VOS250-HMDS
Vacuum Drying Oven with Vacuum Pump
For HMDS / Semiconductor Electronics
LAB1ST VOS250-HMDS is a specialized vacuum drying oven designed for HMDS (Hexamethyldisilazane) pretreatment in semiconductor wafer processing.
It automates key steps such as vacuum pumping, nitrogen purging, and vacuum holding, ensuring precise and repeatable HMDS coating processes for photolithography applications.
Key Facts
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Temperature: RT+10~250°C
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Chamber Volume: 64L, 91L
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For HMDS / Semiconductor Electronics | 100Pa
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316 Stainless Steel Chamber
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Built-in Low-Noise Professional Vacuum Pump and Desiccant Tank
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RS485 Communication Interface
Features
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Semiconductor-Specific HMDS Process Automation with vacuum capability up to 100 Pa
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Programmable Control System for precise management of heating, vacuum, nitrogen purge, and timing parameters
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316 Stainless Steel Chamber offering superior corrosion resistance and durability
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Chamber Heating System with no internal electronic components, ensuring contamination-free operation
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Double-Layer Tempered Glass Door for clear visibility of the workspace
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Adjustable Silicone Rubber Seal ensuring high vacuum integrity
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Standard Over-Temperature Protection for enhanced operational safety
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Standard Digital Vacuum Display for precise real-time monitoring
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Fully Integrated Plug-and-Play Design includes a built-in low-noise professional vacuum pump and desiccant tank for immediate operation
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RS485 Communication Interface for remote monitoring and control
Specifications
Model | VOS200-60L-HMDS | VOS200-90L-HMDS |
|---|---|---|
Environment Temp. | +5 °C ~ 40 °C | |
Display Resolution | 0.1°C | |
Temp. Fluctuation | ±1 °C | |
Ultimate Vacuum | 100 Pa | |
Vacuum Display | Electronic type | |
Chamber Material | 316 Stainless Steel | |
Chamber Volume | 64 L | 2.26 cu ft | 91 L | 3.21 cu ft |
Shelves | 2 pcs | 2 pcs |
Heating Method | Chamber Heating | Chamber Heating |
Inner Dimensions (WxDxH, mm) | 400×400×400 | 450×450×450 |
Outer Dimensions (WxDxH, mm) | 600×570×1390 | 610×590×1350 |
Power Input | 3000 W | 3500 W |
Power Supply | AC220V 50Hz | AC220V 50Hz |
Temp. Range | RT+10 °C ~ 250 °C |
Options
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304 Stainless Steel Exterior Casing
